IEEE

Optimizing Plasma Etching: Integrating Precise Three-Dimensional Etching Simulation and Machine Learning for Multi-Objective Optimization

Abstract: In modern semiconductor manufacturing, optimizing plasma etching processes is key for advancing technology and achieving profitable production. In this study, we propose an efficient process ...
IEEE

Improving Endpoint Detection Sensitivity in Plasma Etching With Small Openings

Abstract: We propose a method that enables real-time endpoint detection during plasma etching of small openings (the absolute area of the opening is at or below 5%) on a wafer. Traditional endpoint ...
IGN

Upper Etching

This is where things start to get interesting, as Upper Etching introduces a major shake-up in terms of gameplay, as the campus doesn't believe in charging its students, meaning you will not receive ...
C&EN

Controlled Layer-by-Layer Etching of MoS

† Department of Advanced Materials Science and Engineering, Sungkyunkwan University, Suwon 440-746, Korea ‡ SKKU Advanced Institute of Nano Technology (SAINT), Sungkyunkwan University, Suwon 440-746, ...
C&EN

Direct Recycling of Silver and Silicon from Solar Cells through Selective Alkaline Etching

School of Resource and Environmental Science, Wuhan University, 299 Bayi Road, Wuchang District, Wuhan, Hubei 430072, P. R. China Hubei International Scientific and Technological Cooperation Base of ...